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| Analysis of micro-servo mechanism of micro electronic discharge machining machine tool |
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GAN Zhen-wei, LI Wen-zhuo, LI Yu-kun
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(College of Mechanical and Electronic Engineering in China University of Petroleum，Dongying 257061，Shandong Province，China )
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| Abstract: |
| The micro servo mechanism is one of the most important parts of micro electronic discharge machining (micro-EDM) machine tool. The high frequency responsibility micro servo mechanism of micro-EDM activated by piezoceramics was analyzed by direct coupled method in ANSYS system. The analyses included structural static analysis and modal analysis, from which its natural frequency, mode shapes and the maximum deflection was gotten when it is activated by an applied voltage. The micro servo mechanism was designed. The results indicate that the microservo mechanism has high natural frequency and high precise, which can meet the need of micro-EDM. Using the designed mechanism, the good effect of micro EDM can be gotten while the efficiency and quality are markedly improved. |
| Key words: microelectronic discharge machining micro-servo mechanism finite element analysis direct coupled-field |
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