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Correction algorithm of random phase shifting errors in phase measuring profilometry based on simulated annealing
REN Xu hu1, YANG Lei1, QU Bo2
(1.College of Information and Control Engineering in China University of Petroleum,Dongying 257061, China;2.Dongying Vocational College, Dongying 257091, China)
Abstract:
A correction model of the random phase shifting error on the basis of random step length was established. The simulated annealing algorithm was adopted in the optimization estimation of random phase shifting error. A new algorithm of truncation phase calculation was derived by least square method. The computer simulated results and the experimental results were presented. The simulation results show that this algorithm can optimize the random phase shifting error accurately and improve the measurement accuracy.
Key words:  phase shifting algorithm  phase measuring profilometry  phase error  simulated annealing algorithm