| 摘要: |
| 微进给机构是微细电火花机床最重要的组成部分之一。运用直接耦合的方法,在ANSYS软件环境下，对微细 电火花机床的微伺服系统中的高频响微进给机构进行了结构的静态分析和模态分析,得到该压电微进给机构的固 有频率和振型以及在电压激励下的最大变形量，并据此设计加工出微进给机构。结果表明，所设计的微进给机构具 冇很髙的固有频率,可以实现高精度、高频响进给，满足了微细电火花加工的要求。采用所设计的微进给机构进行的 微细电火花加工获得了非常好的效果，加工效率大大提高,加工质量明显改善。 |
| 关键词: 微细电火花加工 微进给机构 有限元分析 直接耦合场 |
| DOI： |
| 分类号: |
| 基金项目:中国石油大学(华东)科研基金资助项目(Y030314) |
|
| Analysis of micro-servo mechanism of micro electronic discharge machining machine tool |
|
GAN Zhen-wei, LI Wen-zhuo, LI Yu-kun
|
|
(College of Mechanical and Electronic Engineering in China University of Petroleum，Dongying 257061，Shandong Province，China )
|
| Abstract: |
| The micro servo mechanism is one of the most important parts of micro electronic discharge machining (micro-EDM) machine tool. The high frequency responsibility micro servo mechanism of micro-EDM activated by piezoceramics was analyzed by direct coupled method in ANSYS system. The analyses included structural static analysis and modal analysis, from which its natural frequency, mode shapes and the maximum deflection was gotten when it is activated by an applied voltage. The micro servo mechanism was designed. The results indicate that the microservo mechanism has high natural frequency and high precise, which can meet the need of micro-EDM. Using the designed mechanism, the good effect of micro EDM can be gotten while the efficiency and quality are markedly improved. |
| Key words: microelectronic discharge machining micro-servo mechanism finite element analysis direct coupled-field |
